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Name

Quartz wafer

Affiliate classification
没有此类产品
Description

Quartz wafer is the most common used wafer for semiconductor industry. Due to its high purity, low thermal expansion coefficient, high tensile strength, high transmission rate and unique electronic performance,quartz wafer has been widely applied for chips of PLC plane waveguide spectrometer, MEMS, high-tech semiconductor etc. Besides, quartz wafer features its high temperature resistance, excellent heat conductivity, excellent anti-corrosion performance and sound mechanical performance etc.

Changzhou Haolilai have years of experience in manufacturing high precision quartz wafer. Besides standard 4 inch, 5 inch, 6 inch, 8 inch and 12inch wafer, customized quartz wafer is also available for us.

Corning, Nikon, Heraeus are the most frequent quartz material we use. For other materials, please feel free contact our sales engineer and we will be glad to discuss the availability of material options.

 

Technical parameters of quartz wafer

Property 4 inch 5 inch 6 inch 8 inch 12 inch
Diameter 100 ± 0.1 mm 125 ± 0.1 mm 150 ± 0.1 mm 200 ± 0.1 mm 300± 0.1 mm
Thickness 500 ± 5 um
or customized
625 ± 5 um
or customized
675 ± 5 um
or customized
725 ± 5 um
or customized
900± 5 um
or customized
Roughness Ra ≤ 1 nm Ra ≤ 1 nm Ra ≤ 1 nm Ra ≤ 1 nm Ra ≤ 1 nm
Warp ≤ 10um ≤ 10um ≤ 10um ≤ 10um ≤ 10um
TTV ≤ 3 um ≤ 3 um ≤ 3 um ≤ 3 um ≤ 3 um
Scratch/Dig. 20/10 20/10 20/10 20/10 20/10
Chip ≤ 0.2 mm
Polish DSP (Double Side Polished);
Shape Round, Flat, Notch
Beval 45°, SEMI Spec; C Shape
Material Corning, Nikon, Heraeus
Remarks All specifications aboved can be customized upon your request

 

 

Corresponding parameter set not found, please add it in property template of background
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